**[[PECVD1]]**


=====Deposition Recipes=====
//__**To use the intermetallic crucibles, you must go through specialized instruction with Stephen or one of his representatives (If you don't know if you are one, then you're not).**__// 
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__Aluminum:__
  * Deposition rates should not exceed 5 Å/s
  * For wirebonding purposes, deposit at least 200 nm
  * Start the power slowly (This keeps the crucible healthy)
    * It is important that as you run the deposition, you make small adjustments to keep the deposition rate at or below 5 Å/s
  * Slow deposition as the total deposition amount approaches the target
  * Shutter the sample when the target deposition is reached
  * Report any broken crucibles immediately upon discovery
<del>  * Set the beam to the center of both Lateral and Longitudinal markers
    * This can be done by setting the beam to manual and moving the joystick to the center of its range
    * See picture for "Center"{{ :center.jpg?nolink|}}
  * Do not let the beam touch the edges of the crucible (Think plagues of Egypt sort of bad)
  * Set the Lateral and Longitudinal frequency to 200 and the amplitude to 200.
    * This is done by setting the "Hundreds" number (the one on the top edge of the nob) to 2, and the "Tens" (the numbers on the dial itself) to 00.
    * See picture below for location of frequency and amplitude nobs {{ :nobs.jpg?nolink|}}
  * If you've centered the beam and set the frequency, then all you have to do is keep the deposition rate steady until you reach your target.</del>
 



Germanium

__Nichrome:__
  * Tooling factor: 99.2 (shaky at best)
  * Z-ratio: 1 (should probably be between 0.3-0.33)

Chrome