^ Sample Number  ^ DPE/PE/RPE ^ Acid Clean  ^ Photoresist ^ Heidleberg ^ Etch/clean ^ Test ^
| N1             | DPE 1:33   |             |             |            |            |      |
| N2             | Clean      |             |             |            |            |      |
| N3             | Clean      |             |             |            |            |      |
| N4             | Clean      |             |             |            |            |      |
| N5             | Clean      |             |             |            |            |      |
| N6             | Clean      |             |             |            |            |      |
| N7             | Clean      |             |             |            |            |      |
| N8             | Clean      |             |             |            |            |      |
| N9             | Clean      |             |             |            |            |      |
| N10            | Clean      |             |             |            |            |      |
| N11            | Clean      |             |             |            |            |      |
| N12            | Clean      |             |             |            |            |      |
| N13            | Clean      |             |             |            |            |      |
| N14            | Clean      |             |             |            |            |      |
| N15            | Clean      |             |             |            |            |      |
| N16            | Clean      |             |             |            |            |      |
| N17            | Clean      |             |             |            |            |      |
| N18            | Clean      |             |             |            |            |      |
| N19            | Clean      |             |             |            |            |      |
| N20            | Clean      |             |             |            |            |      |
| N21            | Clean      |             |             |            |            |      |