====L5====

L5 is an 18 channel modulator on x-cut Lithium Niobate, with nitride covering it.  I will etch it, Proton Exchange and Anneal it, and then etch it more in an attempt to create a recipe for working 18 Channel Modulator we can mass produce.  Pictures will be taken at each step to document the process.

^                      ^ M1 Transducers                         ^ M2 Transducers ^ Waveguide Area ^ 
|    Full Nitride      |{{:l5_fullnitride_m1transducers.jpg?500}}|{{:l5_fullnitride_m2transducers.jpg?500}}|{{:l5_fullnitride_waveguide.jpg?500}}|
|15 sec Etch|{{:l5_15srie_m1transducers.jpg?500}}|{{:l5_15srie_m2transducers.jpg?500}}|{{:l5_15srie_waveguide.jpg?500}}|
|After PE and Annealing|{{:l5_pe_m1.jpg?500}}|{{:l5_pe_m2.jpg?500}}|{{:l5_pe_waveguide.jpg?500}}|
|1 min 25 sec more|{{:l5_2ndetch_m1.jpg?500}}|{{:l5_2ndetch_m2.jpg?500}}|{{:l5_2ndetch_waveguide.jpg?500}}|

After the PE and anneal a film-like substance appeared on M1 and a bit on M2.  It does not come off with IPA.

Metricon results after annealing, but before finishing the etching process.

{{:l5_metricon.jpg?500}}

ONly one mode found (and that being abnormal) points toward needing more time in the RIE before PE and Anneal.