PECVD1

Deposition Recipes

To use the intermetallic crucibles, you must go through specialized instruction with Stephen or one of his representatives (If you don't know if you are one, then you're not).

Aluminum:

* Set the beam to the center of both Lateral and Longitudinal markers * This can be done by setting the beam to manual and moving the joystick to the center of its range * See picture for “Center” * Do not let the beam touch the edges of the crucible (Think plagues of Egypt sort of bad) * Set the Lateral and Longitudinal frequency to 200 and the amplitude to 200. * This is done by setting the “Hundreds” number (the one on the top edge of the nob) to 2, and the “Tens” (the numbers on the dial itself) to 00. * See picture below for location of frequency and amplitude nobs * If you've centered the beam and set the frequency, then all you have to do is keep the deposition rate steady until you reach your target.

Germanium

Nichrome:

Chrome