EO TESTS
Tests 1-2:
A. Test channel width
- 10um, 5um, 2.5um
B. Test number of channels [total width]
- 1000um, 500um, 250um, 125um
Process: Choose optimal setup from tests 1-3, then run tests 4-5.
Tests 3-4:
C. Test interaction length
D. Test reverse proton exchange vs normal
Results
1 June 2016: First device coupled at 342-343 degrees and was subsequently tested. Oscillating the voltage between 20-40 volts yielded two TE spots (modes were TM) that blinked on and off.
Device ID: EOTEST3
Parameters: 2.5um waveguides, 250um total width
Conclusion: This really isn't a great result. None of these devices have coupled very well. We are going to start with a new wafer and run a series of tests with dilute proton exchange to ensure excellent waveguides all the way through.
6 June 2016: New wafer patterned, etched, cut. Wafer contains 24 devices.
Running all tests on these devices.
Parameters:
12um channels-2um channels, designated on device. Total EO width changed to 500um, 250um, 125um, 62.5um. Wafer contains 4 of each type of sample for redundancy purposes.
| Channel width | Device number | Proton Exchange | Coupling < | Test Results |
|---|---|---|---|---|
| 12um | 1 | - | - | round corner |
| 12um | 2 | 4.5hr DPE | R351 | ~3 degrees deflection |
| 12um | 3 | |||
| 12um | 4 | - | - | round corner |
| 10um | 1 | 4.5hr DPE | R351,347 | |
| 10um | 2 | |||
| 10um | 3 | |||
| 10um | 4 | |||
| 8um | 1 | 4.5hr DPE | ||
| 8um | 2 | |||
| 8um | 3 | |||
| 8um | 4 | |||
| 6um | 1 | 4.5hr DPE | ||
| 6um | 2 | none | bounce test | no EO effects |
| 6um | 3 | |||
| 6um | 4 | |||
| 4um | 1 | Need pattern | ||
| 4um | 2 | Need pattern | ||
| 4um | 3 | Need pattern | ||
| 4um | 4 | Need pattern | ||
| 2um | 1 | - | - | round corner |
| 2um | 2 | Need pattern | ||
| 2um | 3 | Need pattern | ||
| 2um | 4 | - | - | round corner |
Streak Check on Sample 10UMCH1 after PE and Anneal.