First thing is to turn the temperature up to 255C
Hit the pump button on the west wall
Vent the chamber
Place spacers around the chamber
Vacuum the chamber down to at least below 100 mTorr; usually down to 50
Turn on the gas in the back. Silane is turned on by tapping the big button at the bottom of the screen. There is no password; just hit enter. The gray bar at the top of the screen should turn green. The ammonia is turned on by turning the big red button to the right and turning on the power.
Go back to the machine. At about 240C, turn on the gases
Set the gas pressure to 1
After the temperature and pressure stabilizes, turn on the power.
run the seasoning run for 10 min.
Turn off the power, gases, and pressure
Turn off the vacuum, vent, re-vacuum, re-vent
Place the wafer, vacuum
Run in the same way for about 6 min
Once done, take out wafer, clean machine, vacuum down, turn off gases and pump power.