D7
Past:
D7 was proton exchanged for 10 minutes and annealed for 45 minutes.
Prepped with pmma and aqua save for ESEM.
Written in ESEM at Spot 5 for long transducers, developed for 1 minute.
Evaporated 200nm Aluminum, placed in NMP for liftoff.
Liftoff successful for all but one Low Frequency device. The outside Low F device shorted.
Sign
Low F
Mid F
High F
Smith Charts and SWR for each port Before Impedance Matching (As counted from the top):
| T1 | T2 | T3 |
|---|---|---|
 |  |  |
 |  |  |
| T4 | T5 | T6 |
 |  |  |
 |  |  |
Smith Charts and SWR for each port After Impedance Matching (As counted from the top):
| T5 | T6 |
|---|---|
 |  |
 |  |
A three bounce light guided test was successful with the green laser. The parameters were as follows: 5.4V, T6, a 7 MHz bandwidth centered at 673 MHz with a deflection of about 2 degrees. The positioning angle read 5 degrees. A video was captured and stored on my machine.
Current:
Handed off to Scott for wirebonding and testing.
Future:
??
Sample fabricated by Jacob Kimball
page updated 14 May 2015