E21
Past:
X-cut. Resistor Bridge with 50nm of Nickel.
The Device looks like the following:
| Before Bake | After Bake @ 375°C for 30 min |
|---|---|
 |  |
 |  |
 |  |
Layout
| Before Bake | After Bake @ 375°C for 30 min |
|---|---|
| 1■____■7 2■¯¯¯¯■8 3■____■9 4■¯¯¯¯■10 5■____■11 6■¯¯¯¯■12 | 6■____■7 5■¯¯¯¯■8 4■____■9 3■¯¯¯¯■10 2■____■11 1■¯¯¯¯■12 |
Resistance
| Before Bake | After Bake @ 375°C for 30 min |
|---|---|
| 5-6: 296Ω | 1-2: 18kΩ |
| 5-6: 268kΩ | |
| 7-8: 19KΩ | |
| 9-10: 14kΩ |
Current
The old resistive strips were removed and 50nm of NiCr were put in their place. A 45 min anneal was done at 350°C.
It now looks like the following:
Layout
1■____■7
2■¯¯¯¯■8
3■____■9
4■¯¯¯¯■10
5■____■11
6■¯¯¯¯■12
RB Resistance
1-2: 760kΩ
3-4: 30kΩ
5-6: 42Ω
7-8: 1.2kΩ
11-12: 21Ω
It appears that on 11-12 I hit the old resistive strip and am getting a reading for 50nm of Ni. For 5-6 the old resistive strip shows signs of previous wire bounds which may be doing a similar thing.