L5

L5 is an 18 channel modulator on x-cut Lithium Niobate, with nitride covering it. I will etch it, Proton Exchange and Anneal it, and then etch it more in an attempt to create a recipe for working 18 Channel Modulator we can mass produce. Pictures will be taken at each step to document the process.

M1 Transducers M2 Transducers Waveguide Area
Full Nitride l5_fullnitride_m1transducers.jpgl5_fullnitride_m2transducers.jpgl5_fullnitride_waveguide.jpg
15 sec Etchl5_15srie_m1transducers.jpgl5_15srie_m2transducers.jpgl5_15srie_waveguide.jpg
After PE and Annealingl5_pe_m1.jpgl5_pe_m2.jpgl5_pe_waveguide.jpg
1 min 25 sec morel5_2ndetch_m1.jpgl5_2ndetch_m2.jpgl5_2ndetch_waveguide.jpg

After the PE and anneal a film-like substance appeared on M1 and a bit on M2. It does not come off with IPA.

Metricon results after annealing, but before finishing the etching process.

l5_metricon.jpg

ONly one mode found (and that being abnormal) points toward needing more time in the RIE before PE and Anneal.