Sample created on Nov 6, 2015 Heidelberg Recipe Waveguide HMDS + 1:1 dilute s1805 3000 for 54s 6000 for 6s. Soft Bake 15 min at 100 C.

As noted by the picture there is extensize Al damage. Visibly different from L8.2 and L8.3 by noticing a large chunk of Al missing from the right side column that runs the length of the sample.

PE 15 min and Anneal 45.