I fixed the timing bug and now can produce repeatable images.The blue color comes from over exposure on the camera.
Initial testing the Near Eye Display with the pulsed driver produced 3 distinct points
The Interference lithography has the pinhole added but irregularities still exist in exposure across the sample. Fearing vibrations the following mount was created.
The first completed output coupling grating is shown below. There are plenty of possible improvements, however this serves as a proof of concept.
The recipe is as follows:
Deposit an Unknown amount of SiN
Deposit PR:
Spin on HMDS
3000rmp for 60sec then 6000rmp 4sec
Spin on 1:1 dilute S1805
3000rmp for 60sec then 6000rmp 4sec
Soft Bake:
100°C for 10min
Expose:
Horizantally for 3min in Photolighographic Setup
Develop:
MIF300 for 30sec
Hard Bake:
100°C for 10min
RIE Etch:
Power 100W Pressure 100mtorr O2 set to 31 CF4 set to 12.5 2 minutes
The following recipe works to etch SiN
Power 100W
Pressure 100mtorr
O2 set to 31
CF4 set to 12.5
4 minutes
Just make sure to put the nitride up :)
The new acrylic monitor optical path has been aligned. Two problems remain. First the laser overheats in the plastic housing; this results in about 5 minutes of bright run-time before the monitor dims. Second the monitor was created from a mixture of designs. It works but it means that this run is still not quite a perfect test of our new system.
See work recorded in Scott Gneiting Research Log