Used Al mask to create channels and 2.4mm non-proton exchanged region. Proton exchanged 10min, annealed 45min.

Writing History:

The sample was written at 30KeV spot 4/6 At first I was writing big features with high actual current but low programmed current, I changed this mid way. offset from corner: 5000, -800 (this wasn't far enough down–have corrected y-offset to -1000)

Sample written by Daniel Smalley

prepped with LOR and pmma for writing.

Use ESEM to write 18 channel device

Sample fabricated by Jacob Kimball
page updated 4 June 2015

page updated 2 June 2015