C1 is thick X-cut and has been proton exchanged and annealed (10 min, 45 min).

It was prepped with PMMA and Aquasave for ESEM patterning of an 18 channel device and then developed.

Evaporated 10nm Titanium as an adhesive layer and then 200nm Aluminum, went through liftoff.

Liftoff partially successful, resulting in 11 usable transducers.

Cleaned in Al etch and nanostrip.

Titanium needs removed and prepped again for ESEM.

Sample fabricated by Jacob Kimball
page updated 7 May 2015