C2 is thick X-cut and has been proton exchanged and annealed (10 min, 45 min).

Prepped with LOR (190 degrees C, 60 min bake).

It was then prepped with PMMA and Aquasave for ESEM patterning of an 18 channel device and then developed.

Development with LOR only partially successful, leaving 7 usable transducers.

Evaporated 10nm Nickel as an adhesive layer and then 200nm Aluminum, went through liftoff.

Liftoff partially successful, resulting in 5 usable transducers.

Cleaned in Al etch and nanostrip, prepped again for ESEM with LOR and pmma.

pmma development time: 1:07 LOR development time: 5 seconds

Evaporated 200nm Al.

Liftoff successful. 15 usable transducers. (fault in ESEM write)

For some reason I can find no more than one mode for every wavelength. That mode looks to be interfering with itself causing the patterns in the picture below as well as seems to be repeated or reflected or expanded into two separate but joined lines. There is some deflected light at about 489 MHz with the green laser. However that deflection appears to be limited to a thin slit of a window and is located left of the mode lines almost 30 degrees. I don't know what to think about this one.

The thick sample however provided for great prism coupling:

ready for Stephen and Scott for wire bonding and testing.

Sample fabricated by Jacob Kimball
page updated 7 May 2015