D7 was proton exchanged for 10 minutes and annealed for 45 minutes.

Prepped with pmma and aqua save for ESEM.

Written in ESEM at Spot 5 for long transducers, developed for 1 minute.

Evaporated 200nm Aluminum, placed in NMP for liftoff.

Liftoff successful for all but one Low Frequency device. The outside Low F device shorted.

Sign Low F Mid F High F

Smith Charts and SWR for each port Before Impedance Matching (As counted from the top):

T1	T2	T3
T4	T5	T6

Smith Charts and SWR for each port After Impedance Matching (As counted from the top):

T5	T6

A three bounce light guided test was successful with the green laser. The parameters were as follows: 5.4V, T6, a 7 MHz bandwidth centered at 673 MHz with a deflection of about 2 degrees. The positioning angle read 5 degrees. A video was captured and stored on my machine.

Handed off to Scott for wirebonding and testing.

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Sample fabricated by Jacob Kimball
page updated 14 May 2015