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samples:e21

E21

Past:

X-cut. Resistor Bridge with 50nm of Nickel.

The Device looks like the following:

Before Bake After Bake @ 375°C for 30 min
E21_T1 E21_T1_Ab
E21_T2 E21_T2_AB
E21_T3 E21_T3_AB
Layout
Before Bake After Bake @ 375°C for 30 min
1■____■7
2■¯¯¯¯■8
3■____■9
4■¯¯¯¯■10
5■____■11
6■¯¯¯¯■12
6■____■7
5■¯¯¯¯■8
4■____■9
3■¯¯¯¯■10
2■____■11
1■¯¯¯¯■12
Resistance
Before Bake After Bake @ 375°C for 30 min
5-6: 296Ω 1-2: 18kΩ
5-6: 268kΩ
7-8: 19KΩ
9-10: 14kΩ
Current

The old resistive strips were removed and 50nm of NiCr were put in their place. A 45 min anneal was done at 350°C.

It now looks like the following:
E21b_T1
E21b_T2
E21b_T3

Layout

1■____■7
2■¯¯¯¯■8

3■____■9
4■¯¯¯¯■10

5■____■11
6■¯¯¯¯■12

RB Resistance

1-2: 760kΩ
3-4: 30kΩ
5-6: 42Ω
7-8: 1.2kΩ
11-12: 21Ω

It appears that on 11-12 I hit the old resistive strip and am getting a reading for 50nm of Ni. For 5-6 the old resistive strip shows signs of previous wire bounds which may be doing a similar thing.

Future:
samples/e21.txt · Last modified: 2015/08/05 10:00 by sgneitin