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samples:e5

E5

Past:

200nm Aluminum was deposited. 10nm of Chrome deposited. Written in the Helios. Chrome removed after writting with Chrome etch. 100nm Chrome resistive strip was deposited.

Wire bonded and handed off to Scott for testing.

The Helios cleaning cut is showing a refation pattern and therefore is working. However the resistive strips show infinate resistance suggesting damage. Increasing the thickness of the resistive strip may solve the problem. The devices are pictured below:

Left

t1_left

Center

t2_center

t3_right

Only one resistive strip is showing resistivity and as such no conclusive testing can be done on the EO lines. It is the same resistive strip that is working in E7.

Current:
Future:

Sample fabricated by Jacob Kimball
page updated 16 June 2015

samples/e5.txt · Last modified: 2015/07/21 13:30 by sgneitin