L5 is an 18 channel modulator on x-cut Lithium Niobate, with nitride covering it. I will etch it, Proton Exchange and Anneal it, and then etch it more in an attempt to create a recipe for working 18 Channel Modulator we can mass produce. Pictures will be taken at each step to document the process.

	M1 Transducers	M2 Transducers	Waveguide Area
Full Nitride
15 sec Etch
After PE and Annealing
1 min 25 sec more

After the PE and anneal a film-like substance appeared on M1 and a bit on M2. It does not come off with IPA.

Metricon results after annealing, but before finishing the etching process.

ONly one mode found (and that being abnormal) points toward needing more time in the RIE before PE and Anneal.