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Trace: • a1 • ao_eo_map • a13 • e24 • e25 • new_d_wafer_chris • e15 • a9 • aors_tests • l8.1

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samples:l8.1

L8

Sample created on Nov 6, 2015 Heidelberg Recipe Waveguide HMDS + 1:1 dilute s1805 3000 for 54s 6000 for 6s. Soft Bake 15 min at 100 C. l8.1.jpg
l8.1_wv_tip.jpg
l8.1damagedal.jpg
l8.1error.jpg

As noted by the picture there is extensize Al damage. Visibly different from L8.2 and L8.3 by noticing a large chunk of Al missing from the right side column that runs the length of the sample.

PE 15 min and Anneal 45.

samples/l8.1.txt · Last modified: 2015/11/09 09:23 by taylorcd

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