Sample created on Nov 6, 2015 Heidelberg Recipe Waveguide HMDS + 1:1 dilute s1805 3000 for 54s 6000 for 6s. Soft Bake 15 min at 100 C.

As noted by the picture there is extensive Al damage.

PE 15 min anneal 45.

Here are the transducers. Many of the busses are damaged but at least one appears intact.

The wirebonder refused to bond to the sample and blew away the pads. It is assumed that the odd bubbling in the Al was the result of poor adhesion and this led to the inability to bond. Instead wire glue was used to attach to the busses and extra connections removed by physical scratching.

Upon testing no results were found. No light appeared to be guided. After a short while the device was knocked of the testing bench and the mounting platform destroyed along with the electrical connections. Waveguide testing can be done in the Metricon but this device will never be able to be used now.