heidelberg_liftoff_tests

Heidelberg Liftoff Tests

Week of October 15

AZ3330 Test

Before:

Sample 1:

Sample 2:

After:

Sample 1:

Sample 2:

Conclusion: Liftoff works with AZ3330 as far as effective development of AZ3330 is ensured. Should be good for features 3-5 microns.

Liftoff using resist is much faster than pmma. You can watch it happen (takes about 5 minutes or less) as compared to 4+ hours. Results very comparable.


heidelberg_liftoff_tests.txt · Last modified: 2015/10/15 11:43 by jkimbal2