ElectroHolography Laboratory

Cover top (transducer/waveguide side) of sample with AZ 3330 or other colored photoresist.
1. Do not spin on resist, but try to keep a smooth layer across the sample
Let dry overnight, or bake in a dish in the clean oven until hard (roughly 20 min at 80 C)
Using alignment chuck, clamp into polisher holder
Find the height from the sample with the dials on the polisher
Set polisher to several microns below edge (depending on available space between edge and bonding pads)
1. This distance is variable, since it requires that the sample edge be entirely ground off to a square
2. It is also important to have the polisher move such that the last piece of the sample hit is the edge of interest
Run the polisher until the sample is no longer in contact with the chuck
Change to a finer chuck
Set polisher to 1 micron deeper
Polish until no longer in contact
Repeat steps 7-9 until finished with finest grit
Clean off resist using an acetone spray and IPA rinse

Research Information