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deposition

PECVD1

Deposition Recipes

To use the intermetallic crucibles, you must go through specialized instruction with Stephen or one of his representatives (If you don't know if you are one, then you're not).

Aluminum:

  • Deposition rates should not exceed 5 Å/s
  • For wirebonding purposes, deposit at least 200 nm
  • Start the power slowly (This keeps the crucible healthy)
    • It is important that as you run the deposition, you make small adjustments to keep the deposition rate at or below 5 Å/s
  • Slow deposition as the total deposition amount approaches the target
  • Shutter the sample when the target deposition is reached
  • Report any broken crucibles immediately upon discovery

* Set the beam to the center of both Lateral and Longitudinal markers * This can be done by setting the beam to manual and moving the joystick to the center of its range * See picture for “Center” * Do not let the beam touch the edges of the crucible (Think plagues of Egypt sort of bad) * Set the Lateral and Longitudinal frequency to 200 and the amplitude to 200. * This is done by setting the “Hundreds” number (the one on the top edge of the nob) to 2, and the “Tens” (the numbers on the dial itself) to 00. * See picture below for location of frequency and amplitude nobs * If you've centered the beam and set the frequency, then all you have to do is keep the deposition rate steady until you reach your target.

Germanium

Nichrome:

  • Tooling factor: 99.2 (shaky at best)
  • Z-ratio: 1 (should probably be between 0.3-0.33)

Chrome

deposition.txt · Last modified: 2015/06/15 14:44 by spudbrai