I ran a series of two line waveguides that were 3000um long and rose from 200um beneath the surface to the surface of the substrate. Either speed or power was varied to see the required depth to avoid ablation for different powers. The results are show below.

There appears to be a logarithmic curve between the points, suggesting some form of saturation process at work. From 10% to 50% there appears to be a region that is locally linear. In that region an increase of 4% in laser power results in a increased depth of 1 um.

It should be noted that the change caused by increased velocity is also logarithmic. Doubling the speed does not result in the same change as halving the power. Although both of these decrease the required depth, power decreases it faster.

All anneal tests (10 minutes followed by 30 minutes) proved that all waveguides were Type II.